Industry Leading Thin Films Portfolio

Industry Leading 300mm Films Portfolio

Custom Thin Films
Thermal OxideHDP-CVD
Silicon NitrideLow-k Dielectric
PECVD Oxide & NitrideSilicon Carbide
PE-TEOSPhotoresist coatings
PolysiliconPhotolithography
BPSGPolyimide Coatings
Sputtered Metals
AluminumTitanium
Aluminum/CopperTantalum
Aluminum/SiliconTantalum Nitride
CopperTitanium Nitride
ChromeTitanium Tungsten
GoldTungsten
PlatinumTungsten Si

300mm Custom Thin Films Services

PECVD

  • Amorphous Silicon (a-Si)
  • ARL: Nitrogen Free
  • SiON (Passivation)
  • Nitride (SiN)
  • Silane Oxide (USG)
  • TEOS Oxide

HDP

  • Oxide (STI)

Photo Resist

  • I Line
  • DUV

Metrology Services

  • Thickness Tools
  • Defect Tools
  • Stress

Electroplated

  • Electroplated Cu (Ecu)
  • Electroplated Cobalt (Eco)

CVD Tungsten (W)

  • DirectFill – CVD W

Anneal Services

  • Oven Anneal

PVD

  • Barrier Seed Tantalum (Ta) / Copper (Cu)
  • Barrier Seet Tantalum Nitride (TaN) / Copper (Cu)
  • Aluminum (Al) – Adhesion Layer needed
  • Tantalum (Ta)
  • Tantalum Nitride (TaN)
  • Titanium (Ti)
  • Titanium Nitride (TiN)
  • Tungsten (W)
  • Molybdendum (Mo)
  • Ruthenium (Ru)
  • Cobalt
  • Tungsten Nitride (WN)

Exclusive Reseller of Thin Films from Lam Research

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