Lithography Services

Pure Wafer’s broad Lithography capabilities  accommodate many applications from manufacturing multiple chip on a wafer to single wafer devices. 

Lithography Service I LINE 365nm Stepper

  • Pure Wafer’s Broad Lithography capabilities include 4 Steppers & 2 Contact Aligners to accommodate many applications from manufacturing multiple chip on a wafer to single wafer devices.
  • Pure Wafer provides CAD & Layout services using customer supplied data files.
  • Pure Wafer offers a wide range of Photo Resist options.  See Photo Resist Blanket Coatings.

Stepper Lithography

XLS UltraTech Steppers XLS200, XLS100

  • 200mm Semi Std Notch 725um +/-25um Silicon or Glass Substrates
  • Minimum Resolution =500nm (1um Photo Resist)
  • Wide Range of Photo Resist 1um to 10um 2X1 Aspect Ratio
  • Field Size= Size 20mm X 20mm

GCA Stepper

  • 200mm, 150mm, 100mm, Square Substrates
  • Minimum Resolution =1um
  • Wide Range of Photo Resist 1um to 10um
  • Field Size =15mm X 15mm

Contact Print Lithography 1X

  • 100mm, 150mm, 200mm & 300mm Silicon, Glass or other materials
  • Soda Lime or Quartz Masks Available
  • Minimum Feature:
    • 100mm, 150mm & 200mm >2um
    • 300mm >5um
    • Wide Range of Photo Resist 1um to 50um
    • Filed Size=Up to the entire wafer
    • Cross Section SEM Profiles available upon request.

Outsource your ASML “Zero” layer to Pure Wafer

  • Start material with patterned and etched “zero” layers
  • Etch depth SPC controlled to 1200A ±200A
  • Pre-alignment & fine alignment characterization of all wafers, with batch statistics, available

Use Pure Wafer as your lithography cell backup and short term capacity add partner

  • Lithography cell qualified to customer specifications
  • Matched to customer WIP
  • Regular lithography cell monitoring provides risk free switching

Calibrated wafer grid definition and target placement optimization

  • Patterned, etched, alignment targets (for any system) placement to an accuracy of <15nm
  • Alignment targets (for any system) on both sides of the wafer, with an overlay accuracy of <300nm (front to back)

Lens distortion and Focal Plane metrology

  • Characterize and monitor your lens X,Y distortion
  • Characterize and monitor your lens Focal Plane

Pure Wafer provides Pilot production runs: Lab to Fab

  • Build your product using a foundry lithography system, it’s scalable, ready for production
  • Outsource your critical layers to reduce your costs

Research and Development

  • Explore your next technology node using Pure Wafer’s lithography cell
  • Develop your first prototype devices

Schedule a Demo

Shop Test Wafers

Shop Prime Wafers

Precision Cleaning